Abstract
- Polygon mirror scanners enable ultra-fast scanning speeds above 1,000 of m/s. Thus, they are an efficient tool to distribute multi-kilowatt laser radiation over the work piece without thermal damaging the substrate. A broad range of laser processes from surface cleaning, layer removal, cutting, micro patterning to laser drilling can be driven towards high throughput by the combination of high laser power and fast distribution. However, polygon scanners are associated with a duty cycle of typical 50 to 70 per cent and it can drop below 30 % under non-optimal conditions. Three methods are presented to overcome this duty cycle and lead to a full utilized processing machine. The first way is the synchronization of two individual scanners running in a time-sharing mode with the same laser source. The second way is a single polygon scanning device with two individual beam paths, that operate in a time-sharing mode within the same scan field. The third solution utilizes a laser source in the kW-range twice its average power during the active part of the duty cycle and both, laser and scanner taking a break in the non-active half.